真空电阻凸焊预压阶段的有限元数值模拟

Analysis of pre-pressure stage of vacuum resistance projection welding using finite element procedures

许多MEMS元件需要在真空条件下才能保持良好的性能,采用真空电阻凸焊技术可以达到相当好的真空密封效果。真空电阻凸焊预压阶段采用不同凸焊筋角度和不同预压力对凸焊最终质量都有很大的影响。根据MEMS元件凸焊的具体情况,建立了一个二维有限元凸焊模型,通过对不同预压力和不同角度凸焊筋顶角的有限元接触分析,得出不同预压力和凸焊筋顶角的凸焊筋塑性变形和接触压力分布状况等结果,并通过分析结果得出预压力和凸焊筋顶角对预压变形和接触应力分布的影响规律。文中的结果为凸焊机理研究和MEMS元件凸焊封装外壳的优化设计打下了良好的基础。

Many MEMS components only worked well in vacuum environment,and vacuum projecting welding packaging can keep good vacuum condition.Different pre-pressure and projection welding tendons angle had great influence on weld strength and quali-ty.In this paper,the author created a 2-D finite element projection welding model according to the the vacuum projection welding.By analysis of different pre-pressure and projection welding tendons angle using Ansys software,it was got that several results such as deformation of the project welding tendons,contact pressure and so on.After analyzing the results,we concluded rules of the deformation of the project welding tendons,contact pressure related to different pre-pressure and projection welding tendons.This result laid sound foundation for research of projection welding and MEMS components package shell optimal design.