摘要
气-液-固法(VLS)是目前生长各种准一维纳米结构的主要工艺技术。本文首先介绍了VLS的生长原理,然后以生长机制为主线,着重评论了近3-5年内它在ZnO、GaN、Si以及SiC等纳米线及其阵列合成中应用的某些新进展。最后提出了改进VLS方法的几项措施,并展望了它的今后发展趋势。
At present, vapor - liquid - solid method (VLS) is an important technology used for the fabrications of one - dimensional nanostructures. In this paper, The principle of vapor - liquid - solid method is firstly introduced, then new advances of its applications in the synthesis for various semiconductor nanowires such as ZnO, GaN, Si and SiC are reviewed. Finally, some improved methods are presented and the developed tendency in the future is also indicated.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第5期864-870,共7页
Journal of Functional Materials and Devices
关键词
气-液-固法
金属催化剂
纳米线与阵列
生长机制
vapor- liquid -solid method
metal catalyst
nanowires and arrays
growth mechanism