基于探针阵列的RF天线阻抗测量方法的研究

Study on Impedance Measurement Method of RF Antenna Based on Probe-Array

为研究等离子体放电期间大功率RF天线阻抗变化和满足阻抗匹配器的动态调节的需要,提出了基于探针阵列的RF天线阻抗的测量方法,利用传输线理论,分析了采用探针阵列对大功率RF天线的阻抗进行实时测量的原理,建立了数学模型,构建了天线阻抗的测量系统。该系统集数据采样、数据处理、参数计算等功能于一体,实现了大功率RF天线阻抗的自动测量,给出了系统的实时测量结果。实验结果表明该方法结构简单、可靠、测量精度高、速度快,具有良好的实用价值。

In order to study RF antenna impedance changes during plasma discharge and meet the need of dynamic regulation for impedance matching network, a new impedance measurement method of high power RF antenna based on probe-array is proposed. The real-time measurement principle using a three-probe array is discussed and the mathematic model is deduced according to transmission line theory. An automatic measurement system was designed and implemented, which gathers the functions of data sampling, data processing and parameter calculation together. The real time measurement results are also given. Experimental results show that the proposed method features simple structure, fast measurement speed, high reliability and accuracy, and has a good practical value.