压电薄膜泵驱动的新型直线马达

Piezomembrane pump driven linear motor

提出了一种由压电薄膜泵和液压缸构成的新型直线马达(简称压电液压马达)。介绍了其结构和工作原理,并进行了性能分析与测试。利用尺寸为35 mm×1 mm的薄膜型压电振子制作了两腔体串联压电泵,并与直径15 mm、有效行程100 mm的液压缸进行了联机试验。研究结果表明,在驱动频率一定,驱动电压超过100 V时,驱动力与速度随电压的提高线性增加。在驱动电压为140 V、工作频率为70 Hz的条件下,获得压电液压马达的最大速度和推力分别为14.5 mm/s和17.8 N,最大输出功率为63.5 mW。

A novel piezohydraulic linear motor consisting of a two chamber piezomembrane pump and a cylinder was presented with intruduction of its structure and working principle. The performance of this motor was analyzed and tested. To drive a cylinder measuring Φ15 mm ×100mm, a double chamber serial piezomembrane pump was made using piezoelectric membrane actuators measuring 52535 mm ×1 mm, Experiment on this motorwas performed in terms of flow rate, pressure and output power. The results show that at a given frequency, and with driving voltage beyound 100 V, thrust and velocity of the motor will linearly increase. The achieved maximal velocity, thrust and power of the motor are 14.5 mm/s, 17.8N and 63.5 mW respectively.