低成本柔顺板式精密定位平台的理论与试验

Theory and Experiment for a Low-cost Precise Positioning Stage Based on Compliant Plate

基于柔顺薄板的弹性变形原理,提出一种低成本、整体式柔顺精密定位平台的设计方法。设计一种平板弹簧机构,使平台能够在较低精度驱动器的驱动下获得高精度的位移输出,从而大幅度降低精密定位平台的成本。建立平台的刚度模型,分析驱动器的精度与平台的定位精度之间的相互关系。最后,分析加工误差对平台定位精度的影响,得出影响定位精度的关键结构参数。通过试验测试,得出驱动器的输入位移和精度分别为4 mm和10μm,平台的输出位移和精度分别为9μm和40nm,线性度为0.33%,从而验证了该设计方法的正确性。该平台结构紧凑,成本低,具有很好的性价比,应用前景广阔。

Based on the deformation characteristic of compliant plates, a low cost, monolithic compliant precise positioning stage is presented. A multi-layer-plate spring is designed, which is helpful to realizing high accuracy output of the stage without needing highly precise actuator and control system, so the cost of the stage is lower than that of other types of micro -positioning stages. The stiffness model of the stage is established, and the relationship between the accuracy of the actuator and the positioning accuracy of the stage is analyzed. The key structural parameters that influence the positioning accuracy are obtained, which is helpful to reducing the error caused by manufacture. Experimental results show that the input displacement and accuracy of the stage are 4 mm and 10 μm respectively. The output displacement and accuracy of the stage are 9 lain and 40 nm respectively. The linearity of the output displacement is 0.33%. The research is helpful in designing a low cost compliant stage with a high accuracy.