摘要
简述了正弦相位调制干涉法的发展,重点介绍了双光栅正弦相位调制在物体阶梯表面的高度差、物体表面形貌和振动物体表面形貌的等测量领域的应用,并提出了用双光栅正弦相位调制测量振动物体温度的想法。
The development of sinusoidal phase - modulation in interferometry is introduced. A step - surface altitude difference, surface profile and movement measurement with a grating interferometer using sinusoidal phase - modulation are especially discussed. And the idea of temperature measure-ment of vibrating object using two - grating interferometer with sinusoidal phase modulation is pointed out.
出处
《江西科学》
2008年第5期741-744,共4页
Jiangxi Science
关键词
干涉测量
双光栅正弦相位调制
表面形貌
动态测量
Interferometry, Two - grating sinusoidal phase modulation, Surface profile, Movementmeasurement
