金属微流控芯片的微区电化学加工

A Metal Microfluidic Chip Fabrication with Micro-zone Electrochemical Machining

微流控芯片一般用于分离分析细胞和胞内物质,为对活细胞做分析研究一种金属材料为基材的新型微流控芯片,该芯片具有分离、控制单细胞能力且可借磁力准确定位于新近场光学显微镜的载物台上。具有光谱分析能力的超衍射限光学显微术被研究作微流控芯片的检测器。采用微区控制电化学加工工艺。并对芯片上的微通道做了激光共焦显微术表征。结果显示金属微流道的微区控制电化学加工工艺是可行的,加工精度可达1微米。为发展活细胞分析技术的新显微成像提供一种支撑技术。

A microfluidic chip with metal substrate was studied for studying live cells. The chip has the ability to sepa- rate and position single cell. The chip can magnetically be fixed on the stage of the novel near field optical microscopy. The micro-zone electrochemical process was tested to etch micro-channels in the metal substrate. The micro-zone electro- chemical reaction occurs between the micro-pipe cathode and metal substrate with photoetching picture. The electrolyte solution flows out of the micro-pipe cathode to generate electrode reaction and transmit the reaction thermal energy out. The micro-channel on the metal microfluidic chip has achieved accuracy 1 μm and roughness 0.2μm （rms）. Leica TCS SL （confocal microscopy） characterizes the micro-channel of the metal chip. The result shows that the limited electro- chemical reaction is a suitable micro-manufacture method for metal substrate microfluidic chip.