PECVD热流场数值模拟的可视化研究

Research on Visualization of Numerical Simulation of Thermal and Flow Fields of PECVD

利用数值模拟的温度场、速度场的数据与虚拟现实系统开发的软件开发包Open Inventor接口,结合C++语言在VC平台上实现了PECVD(等离子体增强化学气相沉积)反应室内气体的温度场和速度场的可视化。可视化结果能够准确直观地展示PECVD反应室内气体的温度场和速度场分布情况,为反应室内结构优化设计提供合理化建议;该可视化具有"沉浸感",为优化PECVD生长氮化硅薄膜的工艺参数提供依据,对于使用PECVD生长高质量薄膜材料的太阳能电池具有现实意义。

The data of temperature＇s fields and velocity＇s fields of numerical simulation was used to access to development package Open Inventor developed by VR（Virtual Reality） system. The visualization of gases＇ temperature field and velocity field in PECVD （Plasma Enhanced Chemical Vapor Deposition） reaction chamber was realized by combining C＋＋ on VC platform. The results of visualization can truly and intuitively display distributing situation of gases＇ temperature field and velocity field in PECVD reaction chamber, providing rational suggestion for structural optimization design within the reaction chamber. This visualization is of ＂immersing sense＂, providing the optimization of processing parameters which grow SiN thin film by PECVD with basis, being of realistic meaning for growing high-quality thin film material Solar Cells by PECVD.