同步移相干涉术的相位测量原理

Phase Measuring Principle of A Simultaneous Phase-shifting Interferometry

同步移相干涉测量术是指在瞬间同时采集三幅以上具有一定移相间隔的干涉图的一种干涉测量技术.本文对一种同步移相干涉测量系统进行了琼斯理论分析,推导出该同步移相干涉仪各帧干涉图对应点的光强表达式,从而确定系统所得的相邻干涉图之间的移相步长为π/2,并得出了对应的波面复原算法.

Simultaneous phase-shifting interferometry is a measuring technology with capturing at least three phase-shifting interferograms simultaneously. A simultaneous phase-shifting interferometry is analyzed by JonesMatrix theroy. The intensity of the corresponding points in four interfemgrams are obtained in this simultaneous phaseshifting interferometry system. So the phase shifts between each two closer interferograms are allπ/2 obviously. And phase-shifting arithmetic of this system is presented finally.