2Murarka S P,Fraser D B,Sinha A K,et al.Refrac-tory silicides of titanium and tantalum for low-resis-tivity gates and interconnects. IEEE Journal of Solid State Circuits . 1980
3Plummer J D,Deal M D,Griffin P B.Silicon VLSItechnology:Fundamental,practice and modeling. . 2003
4Murarka S P,Fraser D B.Thin film interaction be-tween titanium and polycrystalline silicon. Journal of Applied Physics . 1980
