摘要
采用双孤磁过滤真空弧源,在钴铬合金基体上成功地沉积了Ti/DLC多层膜,其钛过渡层利用不同的负偏压来制备。利用纳米划痕法来评价薄膜的膜基结合力,类金刚石薄膜的摩擦性能在销盘式摩擦磨损试验机进行测试。划痕法的结果均表明,增加钛的过饺屡后薄膜的结合状况得到明显的改善,纳米划痕法测试膜基结合力表明其临界载荷可达到740mN,摩擦磨损实验可以看出镀膜后的样品的摩擦系数均在0.1左右,DLC薄膜可极大地改善钴铬合金的摩擦学性能。
A study has been carried out to examine the feasibility of high quality diamond-like carbon （DLC） films through preparation of Ti intermediate layer by pulse or direct current biasing voltage prepared on Co-Cr-Mo alloy by the filtered cathodic vacuum arc （FCVA） technique. The mechanical properties such as hardness, sliding wear behavior were analyzed by means of micro-hardness and a pin-on-disk tribometer. The interfacial adhesion was investigated using scratch testing. The result of research showed that Ti intermediate transition layer evidently improves the adhesion strength between films and substrate,the critical load is as high as 740raN,the coefficients of friction stabilize at 0.1 ,improvement of tribological properties of Co-Cr alloy by diamond-like carbon （DLC） films.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2008年第8期1340-1343,共4页
Journal of Functional Materials
基金
国家高技术研究发展计划(863计划)资助项目(2006AA02A135)
关键词
过渡层
膜基结合力
摩擦学性能
临界载荷
intermediate layer
adhesion strength
tribological properties
critical load
