利用激光散斑进行MTF测试技术研究

Method for Measuring MTF Using Laser Speckle

随着焦平面理论水平和工艺技术的发展，焦平面技术越来越多地应用于成像器件中。如何测量焦平面陈列的调制传递函数MTF来评价器件的成像品质就显得越来越重要。利用激光散斑进行MTF测试是一种新发展起来的利用随机目标测试MTF的方法。它可用于可见光和红外范围内的焦平面阵列统计MTF测试。与传统MTF测试方法（如刀口法、、正弦光栅法等）相比，它不需要精密的光学系统和光学准直系统，可用于整个焦平面阵列的统计MTF测试。这种方法的关键是如何形成统计特性较好的激光散斑；另外，由于这种方法的数据处理比较麻烦，所以如何进行数据处理，提高测试精度是这种方法的另一个关键点。本文将就这两个方面做具体论述。

With the development of the technology of theory and manufacture in FPA,the technology is used in imagers gradualy. Therefore, it becomes more and more important how to measure the MTF of FPAs in order to assess the performance of imagers. It is a new method for measuring the modulation transfer function (MTF),by using laser speckle, which belongs to the methods for measuring MTF using random targets. This method allows to be used to measure the MTF of FPA. Compared with the traditional methods,it requires neither critical alighment,nor hight quality optical components.One key of this method is how to generate calibratable laser speckle patterns. Another key is the data processing. In this paper, we mainly discussed the two aspects.