基于Markov链的集束型晶圆制造设备预防性维护建模

Preventive Maintenance Modeling of Cluster Tools for Fabrication Wafers Based on Markov Chain

为了有效提高集束型晶圆制造设备的运行可靠性,同时降低其维护成本,提出了基于Markov链的预防性维护建模方法.根据集束型晶圆制造设备的特点,将设备使用情形分为运行状态、预防性保养状态、保养未能回复状态、预防性维修状态和维修无法回复状态,建立了设备状态转移模型.在此基础上,建立了集束型晶圆制造设备的预防性维护成本模型,进行了仿真实验分析.结果表明,该模型可有效分析不同参数组合下的单位时间预防性维护期望成本.

To improve the running reliability of cluster tools for fabrication wafers, and to reduce maintenance cost efficiently, a Markov chain-based modeling method for preventive maintenance was proposed. According to the characteristics of the cluster tools, five states are defined, such as the running state, pre- ventive maintenance （PM） state, PM un-restore state, preventive repair （PR） state and PR un-restore state. A state transition model was built with the five states. On the basis of the proposed model, an expected preventive maintenance cost model was presented. Finally, the built model was tested with simulative experiment data. The results indicate that the Markov chain-based preventive maintenance model is valid for analyzing the expected maintenance cost rate per unit time according to different combinations of modeling parameters.