基于准分子激光加工技术的内嵌光纤型微流控器件的制备

Fabrication of Microchip with Embedded Optical Fibers by Excimer Laser Processing Technique

为了方便、快速、低成本地检测样品,提出一种内嵌光纤型微流控芯片的制备方法。利用248 nm的KrF准分子激光在聚甲基丙烯酸甲酯(PMMA)基片上进行微加工,构建芯片结构,并嵌入腐蚀过的直径35μm的单模光纤,从而形成内嵌光纤型芯片。探讨了准分子激光加工参数以及嵌入光纤的方法。结果表明,用准分子激光加工芯片,可控性好、简便可靠、加工过程可实现无人化。内嵌光纤实现了光纤的相互对准以及光纤对流道中央的对准,可以灵敏地获取样品的光学信号。

In order to detect samples with convenience, high speed and low cost, we presented a fabrication method of microchip with embedded optical fibers. Polymethyl methacrylate （PMMA） microchip with embedded optical fibers of 35 μm diameter was fabricated using a 248 nm KrF excimer laser processing technique. The processing parameters of excimer laser and the embedding method of optical fibers were studied. The results show that the excimer laser processing is controllable, easy, reliable to realize automation. With the embedded optical fiber system, the mutual aim of the fibers and the aim between the fibers and channel core can be realized, thus resulting in the sensitive detection of optical signal, which is expected to have good applications in the portable blood cell counts and bio-sensors.