摘要
提出了结合磁流变光整加工(MRF)与在线电解修整(ELID)磨削对各种光学材料进行超精密加工的方法,即采用ELID磨削进行预抛光以获得高质量表面,然后采用MRF进行精密抛光以进一步减小表面粗糙度和形状误差。利用该组合工艺对BK7玻璃、硅晶玻璃、碳化硅等光学材料进行了超精密加工实验,可以在短时间内使光学材料工件表面得到亚纳米级的表面粗糙度和峰谷值为λ/20(λ为单位波长,λ=632.8nm)的形状精度。
An ultra-precision synergistic finishing process integrated to magneto-rheological finishing （MRF） and electrolytic in-process dressing （ELID） grinding was proposed for shortening total finishing time and improving finishing quality. A lot of nano-precision experiments were carried out to grind and finish some optical materials such as glass, silicon, silicon carbide, etc. ELID grind ing, as pre-finishing, was employed to obtain high efficiency and high surface quality; and then, MRF, as the final finishing,was employed to improve further surface roughness and form accuracy. In general, form accuracy of -λ/20（λ is a wavelenght unit,λ=632.8nm） peak-to-valley （P-V） and surface roughness less than 10 Angstrom unit are produced in high efficiency.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2008年第21期2540-2544,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50675064)
国家863高技术研究发展计划资助项目(2006AA04Z335)
关键词
ELID磨削
磁流变光整加工(MRF)
超精密组合加工
形状精度
表面粗糙度
光学材料
electrolytic in-process dressing （ELID） grinding
magneto rheological finishing（MRF）
ultra-precision synergistic finishing process
form accuracy
surface roughness
optical material
