热压多晶氟化镁的磁流变抛光研究

Magnetorheological Finishing for MgF_2 Crystal Processed under High Temperature and High Pressure

热压多晶氟化镁是一种被广泛应用的红外光学材料。磁流变抛光因其抛光效率高、磨头无磨损、可实现确定性加工等优点而日益成为倍受瞩目的超精密光整加工技术。在利用传统抛光方法得到热压多晶氟化镁的抛光特性的基础上配制了适用于该材料的磁流变抛光液。通过抛光实验证明,与传统抛光方法相比,采用磁流变抛光方法对热压多晶氟化镁进行抛光,可以得到较好抛光表面质量,并且抛光的效率也大大提高。

Magnesium Fluoride crystal processed under high temperature and high pressure, one of the infrared optic material, has been used in many areas. Magnetorheological finishing （MRF） is becoming an ultra-precision finshing technology because of its excellencies of high polishing efficiency, no wear and certain polishing. In this paper, at the first, the polishing characteristics are obtained by using traditional polishing method; and then, a new magnetorheological fluid suitable to finishing Magnesium Fluoride is developed. Compared to traditional polishing method, the method proposed here can yield higher surface quality and higher polishing efficiency.