基于MEMS器件的电解微细加工技术的研究

Study on the Micro Machining Electrolysis Technique for MEMS Device

基于MEMS器件的微细加工技术,提出了在微电流密度下电化学钝化机理基础上,用高频振动效应消除钝化,用与高频振动同频同步的窄脉冲电流电解作用去除机体材料,实现电解复合微细加工,这是微细加工技术的新构想及发展趋势。

According to the micro machining electrolysis technique for MEMS Device, a compound micro machining electrolysis method was brought forward which uses high-frequency vibration effect to eliminate passivation based on the mechanism of electrochemical passivation under the microcurrent density and uses short duration current electrolysis effect in phase with high-frequency vibration to remove the organism materials. The proposed method is a new idea and the trend in development of micro machining technique.