摘要
自支撑薄膜的制备在核科学研究中至关重要。自支撑薄膜制备技术包括成膜技术和剥离技术。自支撑薄膜的成膜技术与普通有衬薄膜的相似,区别仅在于对薄膜剥离。本工作对自支撑薄膜的剥离技术进行了较为系统的研究,并在实践中比较分析各种脱膜方法及脱膜剂的优缺点。
The preparation of self-supporting film is important for the research of nuclear physics. Preparative techniques of self-supporting include depositing techniques and stripping techniques. Compared to supported thin films, it is critical to strip thin film from the substrate. The paper systematically studies stripping techniques of self- supporting thin film, analyzes and compares advantages and disadvantages of all kinds of stripping methods and releasing agents which have successfully applied to prepare self-supporting thin films.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2008年第10期925-929,共5页
Atomic Energy Science and Technology
关键词
自支撑
薄膜
剥离
脱膜剂
self-supporting
thin film
stripping
releasing agent
