摘要
文中讨论并比较了几种振镜式光学扫描头的技术特性,并结合这些光学扫描头讨论了在实际应用中如何选择合适的光学扫描方式以形成所需要的光学扫描系统。
A discussion and comparison among the different galvanometer scanners were made and the proceeding on how to select optimal scanners to fabricated an optical scanning systems was proposed.The technical specifications of galvanometers were studied to show the system designers on fulfill the application requirements.
出处
《激光与红外》
CAS
CSCD
北大核心
1997年第5期297-300,共4页
Laser & Infrared
关键词
光学扫描
成像系统
检测系统
扫描头
optical scanning, galvanometers, imaging systemw, inspection systems