摘要
The effects of total ionizing dose radiation on direct current (DC) and small-signal radio frequency (RF) performance of multi-finger RF partial deplete silicon-on-insulator lateral double diffused MOS (PDSOI LDMOS) transistors are investigated. The radiation response of the LDMOS transistors with different device structures is characterized for an equivalent gamma dose up to 1Mrad(Si) at room temperature. The front and back gate threshold voltages, off-state leak- age, transconductance, and output characteristics are measured before and after radiation, and the results show a significant degradation of DC performance. Moreover, high frequency measurements for the irradiated transistors indicate remarkable declines of S-parameters, cutoff frequency, and maximum oscillation frequency to 1Mrad(Si) exposure levels. Compared to the transistors with the BTS contact structure,the transistors with the LBBC contact do not show its excellent DC radiation hardness when the transistors operate at alternating current (AC) mode.
研制了一种用于射频领域的叉指栅PDSOI LDMOS晶体管,并分析了总剂量辐照对其静态和小信号射频特性的影响.其静态工作模式下的辐照响应由前/背栅阈值、泄漏电流、跨导和输出特性表征,而其交流工作模式下的辐照响应由截止频率和最高振荡频率表征.实验表明,在室温环境下经过总剂量为1Mrad(Si)的γ射线辐照,不同尺寸和结构的射频SOI LDMOS晶体管的各项指标均表现出明显退化,并且仅当器件工作在静态模式时LBBC LDMOS才表现出优于BTS LDMOS的抗辐照性能.
基金
National Nature Science Foundation of China(No.60576051)~~