洁净室气密性检测方法研究——国标《洁净室施工及验收规范》编制组研讨系列课题之八

Air tightness measuring method for cleanrooms:part 8 of the series of research practice of the national standard task group for the Code for cleanroom construction and acceptance test

分析了在正、负压洁净室进行洁净室气密性验证的重要性,对洁净室气密性相关问题进行了理论计算,给出了具体检测方法,并进行了实验研究。结果表明,一个密封很好的洁净室,500Pa压力的半衰期不足5min,小时泄漏率不到10。

Abstract Analyses the importance of air tightness validation of cleanrooms to prevent contamination diffusion. Presents detailed test method and gives some relevant advices for assessing air tightness of cleanrooms on the basis of theoretical calculation and experimental study. The results show that the half-life time of a well tightened cleanroom is less than 5 minutes, and the hourly leak rate is less than 10 percent. Keywords cleanroom, air tightness, pressure decay, half-life time, hourly leak rate