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基于MEMS技术的气体传感器 被引量：6

Gas sensor based on MEMS technology
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摘要 综述了目前国内外主要MEMS气体传感器的原理,包括谐振式微悬臂梁型、声表面波型、阻抗变化型、声光法、气体光谱、催化燃烧式和高场非对称波形离子迁移谱(FAIMS)检测法。对各种传感器的特点进行了比较。 The principles of gas sensors based on MEMS technology, at home and abroad are summarized,which include resonate micro cantilever, SAW, conductor detect, photoacoustic spectroscopy, gas spectrum, catalytic combustion and FAIMS. The characteristics of all kinds of sensor are compared.
作者 李珂 于世洁 尤政 赵嘉昊
机构地区 清华大学精密仪器与机械学系微光机电集成技术研究室
出处 《传感器与微系统》 CSCD 北大核心 2008年第11期5-7,共3页 Transducer and Microsystem Technologies
关键词 微机电系统 气体传感器 技术 MEMS gas sensor technology.
分类号 TP212.2 [自动化与计算机技术—检测技术与自动化装置]
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参考文献15

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二级参考文献26

  • 1孙纲灿,周常柱,苏贝.用单片机实现瓦斯探测器[J].微计算机信息,2005,21(08Z):66-68. 被引量：6
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共引文献15

同被引文献53

引证文献6

二级引证文献22

传感器与微系统
2008年 第11期

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