基于压电陶瓷驱动器的微动平台控制技术

Based on the Piezoelectric Ceramic Micro-drive Platform Control Technology

压电陶瓷驱动器是近年发展起来的一种新型微位移控制器件,利用压电陶瓷的逆压电效应使之产生相应的应力和应变,可以驱动二维柔性铰链微动机构实现微位移,达到二维定位的目的。通过分析压电陶瓷的基本理论及其非线性特性和补偿措施,阐明压电陶瓷驱动器直接驱动微动平台的控制技术。

piezoelectric ceramic drive in recent years developed a new type of micro-displacement control devices, the use of piezoelectric ceramic inverse piezoelectric effect accordingly to produce the stress and strain, you can drive two-dimensional flexible hinge fretting agencies to achieve micro-displacement, Achieve two-dimensional positioning. By analyzing the basic theory of piezoelectric ceramic and non-linear features and compensation measures to drive out the direct piezoelectric ceramic micro-drive control technology platform.