GMR读磁头用面内取向CoCrPt永磁薄膜的结构与性能

Microstructure and Property of Longitudinally Oriented CoCrPt Thin Film for GMR Head

用磁控溅射的方法在Cr1-xWx衬底上制备了GMR读磁头中用来提供水平偏置磁场的易轴水平取向的CoCrPt合金薄膜。研究了Cr1-xWx衬底(200)织构与W含量之间的关系,沉积在CrW衬底上的CoCrPt合金薄膜微结构及磁性能,以及CoCr中间层的添加对CoCrPt合金薄膜生长出面内取向的(1120)织构的影响及磁性能的影响。实验结果表明,CoCr中间层的引入对CoCrPt合金薄膜易磁化轴的面内取向起到了十分关键的作用。

CoCrPt thin films with longitudinal orientation of easy axis for offering bias field for GMR head have been prepared by magnetron sputtering on Cr1-xWx underlayer. The （200） texture of Cr1-xWx underlayer was investigated. The microstructure and magnetic properties of CoCrPt thin films with and without CoCr intermediate layer were investigated, respectively. The employment of a 3nm CoCr intermediate layer was proved to be crucial to suppress the misfits between CoCrPt magnetic layer and CrW underlayer.