LTCC电容π型等效电路模型的提取与验证

The Research on π-equivalent Circuit of LTCC Capacitor

对LTCC内埋置MIM电容的传统π型等效电路进行了研究,对其等效电路模型的参数进行了提取,详细推导了该模型中元件的参数估算公式,并用二层LTCC电容进行仿真验证,可以看出建立的三维HFSS模型在第一谐振频率点内与电路仿真结果有很好的一致性,但是随着频率的增高,片式器件高频寄生效应就会更加明显,因此需要提取更加准确的高频等效电路。

The n-equivalent circuit model of laminated MIM LTCC capacitor is deduced in this paper, and the parameters of the equivalent circuit are extracted in detail. Laminated 2-1ayers capacitor is utilized to verify the model. It can be seen the frequency responses between 7r-equivalent circuit and 3D HFSS model get a good agreement up to the fundamental self-resonance frequency （SRF）. It can be observed that RF parasitic effect is more obvious when increasing frequency up to its secondary resonant frequency, so more accurate equivalent circuit needs to be extracted.