摘要
提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路,将物体偏转一微小角度(等效为物面与参考面间形成空气楔)产生等厚干涉,可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理,并进行了实物测量,给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌,所以具有灵敏度高的优点。
A method of shape presented. In the typical setup measurement based on ESPI of Michelson interferometer, carrier-frequency modulation is turning the tested object a small angle generates an air wedge between the object plane and the reference plane. The wedge produces equal thickness interference fringes. A carrier fringe pattern containing height information is formed on the object surface. The carrier fringe pattern is captured by a CCD camera. The phase of the object can be derived by Fourier transform and the shape measurement is realized. The principle of the method is described and the experiment results are given. The results indicate that the method has the virtue of high sensitivity because speckle pattern interferometry is used.
出处
《应用光学》
CAS
CSCD
2008年第6期874-877,共4页
Journal of Applied Optics
基金
山东省科技攻关项目(2007GG20004002)
关键词
物理光学
电子散斑干涉
形貌测量
傅里叶变换
迈克尔逊干涉
physical optics
electronic speckle pattern interferometry （ESPI）
shapemeasurement
Fourier transform
Michelson interference
