摘要
研究了利用低能离子束技术,在单晶硅片等多种基体表面形成类金刚石薄膜(DLC膜)的工艺,测试了其物理化学力学性能,在硅片、硅太阳电池和半导体等表面进行了形成类金刚石膜的应用研究。
The technology of diamond like carbon (DLC) films on singlecrystal silicon and other substrates was studied by low-energy ion beam deposition. Properties of DLC films were tested and applications were investigated.
出处
《材料工程》
EI
CAS
CSCD
北大核心
1997年第1期3-7,共5页
Journal of Materials Engineering
关键词
类金刚石膜
低能离子束
性能
DLC
薄膜
diamond like carbon film low-energy ion beam property application
