二氧化硅微球的扫描电镜测长及形貌观察条件

Conditions for topography and diameter analysis of SiO_2 micro-ball by scanning electron microscope

本文用日立S-4800型冷场发射扫描电镜对不同粒径二氧化硅微球进行测长研究及形貌观察,针对二氧化硅材料特性和工作目标,使用多种测试条件,通过结果对比,分别获得测定二氧化硅微球直径和进行形貌观察的适宜条件。

The diameter and topography of SiO2 micro-ball with different diameters is observed by Hitach S-4800 Scanning Electron Microscope in this paper. The various analysis conditions are investigated for different analysis aim, such as scanning speed, acceleration voltage, work distance, probe current and so on. The appropriate conditions are obtained for observating topography and diameter of SiO2 micro-ball by comparing the experimental data. The conductivity is lower for SiO2 material. The imaging mode with slow speed is not appropriate for SiO2 micro-ball. The topography observation of SiO2 micro-ball should be carried out under lower acceleration voltage and longer work distance. And the diameter measurement of SiO2 micro-ball should be processed using opposite conditions comparing with above aim.