等离子浸没注入对纯钛表面改性的成分分析

The Composition Analysis of Modified Surface of Pure Titanium by Means of Plasma Ion Implantation Technique

目的:通过等离子浸没注入对纯钛试样进行表面改性,分析改性后纯钛试样表面的成分。方法:利用等离子浸没注入的方法对纯钛试样表面进行氮离子注入,用X射线衍射和X射线光电子能谱对注入层进行成分分析。结果:离子注入改性后试样的颜色呈淡金黄色色泽,X射线衍射分析和X射线光电子能谱分析结果表明改性后试样的注入层形成了含氮化钛的改性层,其主要化学成分为TiN和Ti4N2.33。结论:用氮等离子浸没注入的方法处理纯钛试样,能在其表面改性层生成钛的氮化物。

Objective：To analyze the modified surfaces of pure titanium by means of plasma ion implantation technique.Methods：Nitrogen was implanted into the surface of pure titanium by plasma ion implantation.The implanted layer was analyzed by X-ray diffraction and X-ray photoelectron spectroscopy respectively.Results：The samples modified by plasma ion implantation showed light golden.X-ray diffraction and X-ray photoelectron spectroscopy detected TiN in the implanted layer,which was generally composed of TiN and Ti4N2.33and the composition in different substrates varied.Conclusion：Nitride was found in the implanted layer on the modified surfaces of pure titanium by plasma ion implantation technique.