电热微夹持器的结构设计与数值仿真分析

Structural design and numerical simulation analysis of electrothermal clamp holder

微型机械电子系统(MEMS)是近年来研究的热点,其中微夹持器的研究受到越来越多的关注。文中采用有限元软件ANSYS对平行梁结构电热微夹持器进行了数值仿真分析,模拟出微夹持器的输出位移、末端刚度、夹持力与响应时间等性能参数随结构尺寸的变化情况,并对仿真的结果进行了讨论。

Micro Electro-Machinery System （MEMS） is the hotspot of study in recent years, among them the study of micro clamp holder has been come under more and more attention. By adopting finite element software ANSYS this paper carried out numerical simulation analysis on the parallel beamed electrothermal micro clamp holder. The circumstances of functional parameters of output displacement, end stiffness, clamping force and response time etc. of the micro clamp holder that varies along with structural dimensions were simulated, and a discussion has been made on the result of simulation.