摘要
依据光学谐振腔的图解分析与设计方法,对以Nd:YAG固体激光器作光源的激光切割机进行了设计改进,实现了高亮度激光输出.并利用该设备对硅太阳电池进行了激光精密切割试验,使埋栅太阳电池电极槽达到了平均宽度为150±5μm,槽深100±10μm的设计指标.在发射结卷包太阳电池所用的硅衬底片上进行激光精密穿孔,目前最小孔径为20μm.通过应用激光精密刻蚀技术,现将埋栅太阳电池光电转换效率提高到了21%,接近该领域的世界先进水平.
According to graphic analysis and design method of optical resonator, a progress in ameliorating laser-cutter with Nd：YAG solid Laser as lamp-house was made,and the high brightness laser output was achieved. Utilizing this equipment to study precision incision in silicon solar cells,it is realized that average electrode groovy width of the buried contact solar cells is 150±5 μm,and the depth is 100±10μm. Having laser minutely perforating in silicon wafer used to the emitter wrap-through solar cells, the minimal perforated diameter is 20μm. Through utilizing laser minutely cutting technology, the photoelectric conversion efficiency was improved to 21% and approaching themost advanced level of the area in the world.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2008年第11期2137-2140,共4页
Acta Photonica Sinica
基金
南开大学本科创新科研“百项工程”基金资助
关键词
高亮度激光
硅太阳电池
对称式抽运
转换效率
High-brightness laser
Silicon solar cells
Symmetrical pump
Conversion efficiency
