聚合物先驱体转化法制备陶瓷MEMS器件

Fabrication of ceramic MEMS devices by polymer precursor derived ceramic

简述了聚合物先驱体转化陶瓷(PDC)法在制备陶瓷纤维、陶瓷涂层和陶瓷粘接等方面的应用,重点介绍了PDC法在微机电系统(MEMS)器件制造中的发展概况。耐高温MEMS的发展面临两大挑战:高温材料的选择和发展合适的微加工技术。指出了传统加工技术制备陶瓷MEMS的不足,着重介绍了PDC法制备陶瓷MEMS的优缺点。以国外采用PDC法制备陶瓷MEMS的几种典型器件为例,指出该方法在制备陶瓷MEMS器件中存在的问题和未来的发展方向。

It was summarized that the ceramic fibers, ceramic coating and ceramic joining were fabricated by the polymer precursor derived ceramic （PDC） method. The development of the PDC method was emphatically introduced in the fabrication of micro-electronic-mechanical-system（MEMS） devices. The development of MEMS for high-temperature resistance faces two challenges： selecting suitable materials of high-temperature resistance and developing appropriate micro-fabrication techniques. The shortcoming of preparing ceramic MEMS were pointed out by traditional fabrication techniques, and the advantages and disadvantages of preparing ceramic MEMS were mainly introduced by PDC method. With the several typical ceramic MEMS devices which were fabricated by PDC method in foreign corporation as example, the existent problems and future development direction were presented in preparing ceramic MEMS devices by PDC method.