基于光纤光谱仪的宽光谱综合监控系统

A comprehensive monitoring system with wideband spectrum by fiber optic spectrometer

本文介绍了一种基于光纤光谱仪的宽光谱综合监控系统,该系统在光学镀膜过程中,采用实时宽光谱、评价函数、单波长极值、色度分析等多种方法综合监控光学薄膜膜厚。详细阐述了该系统的工作原理、硬件系统和软件系统,并进行了一系列镀膜实验。实验结果表明该系统能够实现光学镀膜在线实时监控,且非常适合国产镀膜设备的升级改造。

The fiber optic spectrometer was introduced into a comprehensive monitoring system with its wideband spectrum for the deposition process of optical thin films, by which the film thickness can be monitored comprehensively by such methods as the real-time wide spectrum range, evaluation function, single-wavelength extremum and colorimetric analysis. The working principle, hardware and software systems of the system are elaborated in detail. With a series of tests done for the thin film preparation under the monitoring system, the results showed that the system can play an on-line and real-time role in monitoring the optical thin film preparation and fits well the upgrading of domestic coating systems.