机器人系统在溅射镀膜设备中的应用

Application of robotic system in sputtering coating system

现代工业的发展要求真空镀膜设备具有对复杂曲面零部件进行均匀镀膜的能力,要实现此类工件的镀膜要求,只有引进机器人技术才能达到。本文介绍了机器人系统在磁控溅射镀膜机中的应用,并对镀膜机器人应用条件和控制过程进行论述。

With the rapid technological development in recent years, the vacuum coating system are required to deposit thin films homogeneously on the workpieces whose surfaces are very complex. To answer the purpose, the only way is introducing the robotic system into vacuum coating. Describes the application of robstic system in magnetron sputtering coaters, as wellas the necessary conditions relevent to the appplication and control process.