ICP-AES法测定氧化铪中12种杂质元素

Determination of impurities in HfO_2 by ICP-AES

建立了电感耦合等离子发射光谱法测定氧化铪中Al、Ca、Mg、Mn、Na、Ni、Fe、Ti、Zn、Mo、V、Zr等12种杂质元素的分析方法。方法的检测范围为0．004％～5％，标准偏差小于7％，加标回收率94％～103％，方法已用于常见样品分析：

In this paper, we established a new method which can analyze 12 kinds of impurities in HfO2 by ICP-AES. The determination range of the impurities was 0.004% - 5%, recoveries were 94% - 103% and the RSDs of determination were 1.0% -6.8%. It has been applied to the determination of impurities in HfO2.