摘要
硅片的电火花线切割是一种新型的工艺方法,由于硅片的高电阻率特点,脉冲电源的参数与传统线切割设备有较大不同。通过采用MCS51系列的单片机,设计一种基于高压直流电源改进为脉冲电源的控制系统,应用到高速走丝线切割机床上来对工件进行试切,可以取得理想的切割效果。
Wire Electrical Discharge Machining (WEDM) of silicon wafer is a new new technological process. Due to the high resistivity of silicon wafer, the parameters of pulse power are quite different from those used in traditional WEDM equipments. By using MCS51 single chip microcomputer, a control system of pulse power improved from high voltage DC power is designed. The trial application of the improved system in HS-WEDM Machine to cut workpiece produces perfect cutting results.
出处
《南宁职业技术学院学报》
2008年第6期98-100,共3页
Journal of Nanning College for Vocational Technology
关键词
单片机
电火花线切割
脉冲电源
硅片
Single Chip Microcomputer
WEDM
Pulse Power
Silicon Wafer