摘要
研究了不同磁场约束条件下C2H2射频放电对PET圆筒内表面性能的影响规律。利用傅里叶变换红外光谱(FTIR)对不同等离子体条件下处理的聚酯样品表面进行了分析。并且通过接触角测试仪对沿聚酯圆筒轴线方向上不同区域的含氢碳薄膜表面的润湿行为进行了分析。结果表明,有外部磁场约束时乙炔等离子体处理后样品表面膜层中氢含量较高,且碳原子主要以sp3组态互相键合。反应气压较高时,改性后的表面润湿性分布均匀。在反应气压较低时,改性后内表面的润湿性在轴向方向上分布不均匀,磁场的加入可以有效提高表面处理的均匀性。同时外部磁场的引入也增加了改性后膜层性能的稳定性。
The inner walls of the polythylene terephthalate (PET) tubes were modified with RF C2H2 plasma. The microstructures and properties of the amorphous hydrogenated carbon (a-C:H) films, deposited under different conditions on the inner walls by rf plasma enhanced chemical vapor deposition (PECVD), were characterized with Fourier transform infrared spectroscopy (FTIR) and contact angle measurement with sessile technique. The results show that the surface modification with C2H2 plasma considerably affects its stoiehiometries and its properties. For instance, the external magnet- ic fields result in a high H content and sp^3 bonded carbon atoms. And higher pressure leads to more uniform surface-wettability; in contrast, low pressure is responsible for the non-uniform axial distribution of wettability. We suggest that the extemal field significantly may improve the uniformity of surface properties and the long term stability of the surface-modi-fied PET inner walls.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2008年第6期584-589,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金(No.10775036和No.50773015)
新世纪优秀人才计划资助项目
关键词
含氢碳薄膜
水接触角
等离子体增强化学气相沉积
环形磁铁磁场
聚酯筒
Amorphous hydrogenated carbon, Water contact angle, Plasma enhanced chemical vapor deposition,Magnetic field of circular magnet, PET tube