含钌氧化物靶的制备与电性能测试

Preparation of Ruthenium Oxide Target and Its Electrical Property

本文报导了以水合ＲｕＯ２为原料而采用固相反应、烧结工艺制备脉冲激光沉积用ＲｕＯ２、ＢａＲｕＯ３、ＳｒＲｕＯ３靶材的工艺．

In this paper, solid state reaction and sintering processing with RuO 2· n H 2O as raw material for fabricating target material of RuO 2 and BaRuO 3 and SrRuO 3 used in PLD method is reported. The composition, crystal structure and electrical conductivity of the materials were also examined. We first found that the sintered BaRuO 3 has a semiconductor metal transition near room temperature.