基于平面螺旋电感的微型ICP激发源

A Microfabricated ICP Source Base on Planar Spiral-Shaped Coil

随着微电子机械系统(MEMS)技术的发展,基于MEMS的光谱仪分光系统和光电检测系统研究报道日益增多,但是微型激发源的研究报道相对较少。文章介绍了一种基于表面微机械加工技术的微型电感耦合等离子体(ICP)激发源,其RF功耗在数瓦以下、氩气消耗量远低于常规ICP激发源。阐述了这种激发源的结构、加工工艺流程及性能指标。同时还介绍了作者设计制作的基于PCB工艺的微型ICP激发源,采用了平面螺旋电感线圈和平面梳状交指电容,在100 Pa氩气气压下用13.56 MHz,3.5 W射频功率激励点燃了等离子体火炬,给出了装置的外观微型ICP火炬的照片。最后展望了该微型的ICP激发源在光谱仪中的应用前景。

Along with the development of micro-electromechanical system technology,the reports on the optical splitting systems and the photoelectric detection systems of spectrometer based on micro-electromechanical system have become increasingly popular,whereas the reports on micro excitation source in the development of micro spectrometer are few.In other words,the development of micro excitation source is the most important part in the development of the micro spectrometer.A novel low-pressure microfabricated inductively coupled plasma source is introduced,which is an emission spectrum excitation source based on surface-micromaching technology.Its radio frequency power consumption is much lower than the general inductively coupled plasma source.The source can work at an argon gas pressure of 100 Pa,and thus consumes less argon.The principle of operation for a microfabricated inductively coupled plasma source is illustrated.The layout of the planar spiral-shaped coil,the matched capacitor and the resonant capacitor is given.The fabrication process and properties of the plasma source are described.Meanwhile a novel inductively coupled plasma based on the technology of printed circuit board is introduced.In the experiment,the planar spiral-shaped coil and interdigatial capacitor were used.When the pressure of argon was 100 Pa and the radio frequency power was 3.5 W at 13.56 MHz the novel inductively coupled plasma was ignited.The photo of the argon ignition is given.Finally the potential application of the micro inductively coupled plasma in spectrometers is presented.