摘要
建立了气浮支撑粗精动超精密运动平台系统理论模型。在分析了系统中存在的位置耦合与力耦合的特性以及系统模型随平台质量比的变化产生的模型特性变化的基础上,用矩阵分式形式描述了系统的传递函数矩阵并分析了系统的能控性与能观性。基于建立的模型设计了LQG多输入多输出运动控制器并进行了运动平台控制仿真,结果表明,通过抑制气浮粗精动平台中产生的耦合作用可提高系统动态性能。
This paper discussed the model of air-bearing coarse-fine positioning stage. It analysed the positioning and force coupling as well as the model＇s change during the mass ratio of coarse stage to fine stage changing. Moreover this paper analysed the controllability and observability using the matrix-fraction description. And a MIMO LQG controller was designed based on this coarse- fine stage model. The result of the simulation shows that the MIMO LQG controller can effectively restrain the coupling and improve the positioning property.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2008年第23期2773-2776,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50577037)
关键词
粗精动
力耦合
建模
LQG控制器
coarse- fine
force coupling
modeling
LQG controller
