基于MMIC工艺的片上射频LC无源滤波器

MMIC-Based RF On-Chip LC Passive Filters

设计、制作了几种基于MMIC工艺的片上LC低通/带通滤波器并进行了测试.测试结果表明,一个3nH的MMIC电感在6.8GHz下品质因数达到13.8,自谐振频率达到15.5GHz;制作的LC低通/带通滤波器的截止频率或中心频率与设计偏差很小,分别为2%和3.3%;低通滤波器在各自通带内的插入损耗小于3dB,带通滤波器在中心频率的插入损耗为7.2dB.

The design and fabrication of on-chip LC low/band-pass filters are presented,and the filters are accomplished with MMIC process. Measurement results show that the Q of a 3nil inductor is 13.8 at 6.8GHz and the self-resonant frequency is 15.5GHz. The measured cutoff/center frequencies of low/band-pass filters agree with the design, and the contrast are 2% and 3.3% respectively. The insertion loss of low-pass filters is less than 3dB,and the insertion loss of band-pass filter is 7. 2dB at the center frequency.