磁控溅射合成Ag/类PEO纳米功能性薄膜的研究

Study of Ag/PEO-like Nano-composite Functional Film by Magnetron Sputtering

采用反应磁控溅射方法,用Ag作为溅射靶,用乙二醇二甲基醚挥发性单体通过等离子体化学气相聚合制备含Ag的PEO杀菌薄膜;通过FTIR光谱、XPS能谱、UV可见光谱等确定薄膜中的各种成分以及含量,并研究工艺条件对薄膜结构成分的影响;XRD衍射分析薄膜中所掺杂银的晶面结构和Ag的颗粒度大小;AFM分析了表面的形貌和结构。实验发现等离子体的宏观参量如源气体流量比、工作气压、溅射功率等对所聚合的薄膜结构成分影响较大;Ag在薄膜中以原子形态存在而且以(111)晶面为主;Ag(111)对杀菌应用起主要的作用。

Polymerization polyethylene oxide （PEO）-like and Ag nanocomposite was prepared by means of magnetron sputtering Ag while togetherly feeding with glycol dimethyl ethers vapor as monomer. The nanocomposite were characterized by using UV-visible spectroscopy, Fourier transform infrared （FTIR） spectroscopy, x-ray diffraction （XRD）, and atomic force microscopy （AFM） for crystal status, surface morphological, structural and chemical properties. The influence of the process conditions on the structure and compositions of the film was studied. It was found that the macro parameters of plasma, such as working pressure, Ar to monomer ratio, and sputtering power, have greater influence on the structure and compositions of the film; The particles of silver distributing uniformly in the body of nanocomposite is in atomic status and grown preferentially in facet （111）, which is benefit to the antibacterial application.