Pt掺杂对Sb：SnO_2薄膜酒敏性能的影响

PT-DOPING EFFECT ON THE SENSITIVITY OF SB:SNO2 ALCOHOL-SENSITIVE THIN FILM

采用非醇盐溶胶-凝胶工艺在Al_2O_3基片上旋转涂敷制得掺Sb的SnO_2薄膜。再经直流溅射制得掺Pt的Sb:SnO_2薄膜,探讨了不同Pt添加量对气敏性能的影响。结果表明,对Pt的溅射时间为90s时,元件对50ppm浓度乙醇气体的灵敏度高达43。经选择性研究表明,该元件有较好的选择性和优异的酒敏特性。

Sb-doped SnO2 thin films were deposited on Al2O3 substrates by spin-coating using unalcolate sol-gel synthesis. Then Pt-doped Sb-SnO2 thin film were deposited by means of sputtering.We discussed the effect on the sensitivity of thin films to different amount of Pt.The analysis indicates that the sensitivity of SnO2 thin films is 43 for 50ppm alcohol vapor when sputtering Pt for 90 seconds.The sensors were found to obtain better gas sensitiyity and be excellent for alcohol detection through selectivity experiment.