摘要
以某6英寸晶圆厂节能改造工程为例,详细介绍了热回收装置、变频器和T5一体化节能灯在节能方面的应用及相应的节能计算,并列举了节能改造中常用的技术措施。
Due to the wafer factory＇s huge energy consumption and the pollution to ambient environment, the establishment of the green wafer production plant is receiving increasing attention. The purpose of this idear is finding a way to reduce energy consumption and protect environment. Combining project reconstruction cases, this section introduces Heat recovery, Frequency converters, energy-saving application of T5 integration energy-saving lamps and the energy-saving calculation,and lists the commonly used technical measures in energy-saving reconstruction.
出处
《洁净与空调技术》
2008年第4期40-43,共4页
Contamination Control & Air-Conditioning Technology
关键词
热回收
节能
变频器
晶圆厂
Heat recovery
Energy efficiency
Frequency converters
Fab
