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一种用于微加速度计的低输入电容运算放大器

Low input capacitance amplifier for accelerometer
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摘要 采用0.5μm CMOS工艺设计了一种低输入电容运算放大器。该运算放大器通过采用正反馈回路消除运算放大器输入管的密勒电容来实现低输入电容。分析了寄生电容对加速度计灵敏度的影响,并提出了一种采用低输入电容运算放大器的开环加速度计接口电路实现方法。结果表明:采用低输入电容运算放大器能够有效地提高加速度计灵敏度。 A low input capacitance amplifier(LICA) is designed by using 0.5 μm CMOS technology. The miller capacitor is cancelled by the positive feedback in the LICA. The influence of parasitic capacitance on sensitivity of accelerometer is analyzed, and a realization method of the interface circuit of open-loop accelerometer with LICA is presented. The simulation results demonstrate that using LICA is effective to improve the sensitivity of accelerometer.
出处 《传感器与微系统》 CSCD 北大核心 2008年第12期76-78,共3页 Transducer and Microsystem Technologies
关键词 低输入电容 正反馈 加速度计 灵敏度 low input capacitance positive feedback accelerometer sensitivity
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