表面等离子共振Ag/TiO_2复合膜气体传感器

Surface plasmon resonance gas sensor with composite of Ag/TiO_2 film layer

提出一种新型的Ag/TiO2复合膜三甲胺(TMA)气敏光化学表面等离子共振(SPR)传感器结构。结构中使用一只金红石材料作成的棱镜作为耦合棱镜,在棱镜的底边采用射频溅射技术制作Ag/TiO2复合膜,Ag膜和TiO2膜的厚度分别为50 nm和100 nm,在复合膜上设置待测气体的样品池。在He-Ne光入射激励下,复合膜的分界面发生SPR现象。实验结果表明:SPR角与TMA气体的体积分数基本呈线性比例关系。

A novel surface plasmon resonance （SPR）trimethylamine （TAM）gas sensor structure coated a combined Ag and TiO2 film is proposed. The combined film is prepared by RF-reactive-sputtering deposition on rutile prism, and the thicknesss of Ag and TiO2 films are 50 nm and 100 nm, respectively. A gas sample cell is set up on the surface of the combined film. The phenomena of SPR occurs on the interfue of combined film under the excitation of He-Ne light. The experiments show that the SPR angle is almost linear with the TAM volume fraction.