摘要
针对光学元件表面污染物,设计了污染物检测仪系统.阐述了系统硬件和软件的构成,简单介绍了污染物图像的处理,分析了相机在扫描过程中的运动控制,以及高精度的运动控制的实现.最后提出了污染物与疵病区分的理论与方法.
For the contamination of optical surface,the inspection system was designed. It presents the constitution of hardware and software of the system and introduces the image processing for contamination in this paper. After the working process of line scan cameras, the analysis of controlling- movement was done and high precision for movement controlling was achieved. Finally, the theory and method for distinguishing between contamination and flaws was presented.
出处
《机械与电子》
2008年第12期11-14,共4页
Machinery & Electronics
关键词
检测仪
污染物
线扫描相机
三维电控平移台
疵病
inspection instrument
contamina- tion
line scan cameras
three - dimensional elec- trical - controlling move apparatus
surface ,flaws
