摘要
本实验中首次采用铜材料作为声表面波驱动装置的叉指换能器材料。对铜材料和铝材料进行了详细比较,得到铜材料相比于铝材料的优点。采用并详细对比了离子铣和剥离工艺两种制造工艺,实验表明剥离工艺效果更好。得到了利用剥离工艺制造的铜叉指换能器的原子力显微镜轮廓。制造了声表面波驱动装置并得到了优化的制造参数。
For the first time, copper was used as the IDT （interdigital transducer） material for the surface acoustic wave （SAW） actuation device in this experiment. A detailed comparison between copper and aluminum was done and the advantage of copper over aluminum was obtained. Two fabrication methods, i. e.ion beam milling and lift-off, were adopted and compared in detail. The results show that lift-off method is better than that one. AFM contour of the copper IDTs adopting lift-off method was procured. SAW actuation device was fabricated and the optimum fabrication parameters were obtained experimentally.
出处
《微细加工技术》
EI
2008年第5期21-23,共3页
Microfabrication Technology
基金
国家自然科学基金资助项目(60777016)
关键词
驱动
剥离工艺
离子铣工艺
actuation
lift-off process
ion beam milling
