石英音叉陀螺芯片工艺误差的影响分析

Analysis of the Influences of Machining Errors for Quartz Tuning Fork Gyroscope

加工高质量的石英音叉需要解决工艺误差导致的机械耦合误差及频率漂移等问题。使用测量显微镜对石英音叉驱动叉指的长度和宽度在主要工艺过程中的变化进行了测量,其中以石英音叉化学腐蚀引入的尺寸误差较大。采用有限元法建立了引入工艺误差的仿真模型,得到的仿真结果更接近实际测试数据。质量平衡调节可以有效地补偿工艺误差,消除机械耦合误差,提高石英音叉陀螺的性能。

To get high quality quartz tuning forks, mechanical coupling error and frequency excursion by machining errors must be resolved. The lengths and the widths of driving forks are measured with measuring microscopes in the main machining processes. The chemical etching of quartz is the main reason of machining errors. The result gotten by the simulation model which is built by the finite element method considering machining errors is closer to the testing data. The mechanical coupling error is eliminated effectively by mass balancing method which could compensate the machining errors, and the performance of quartz tuning fork gyroscope is improved.