摘要
以醋酸锶、醋酸钡和钛酸四丁酯为前驱体原料,采用溶胶-凝胶(Sol-gel)法,利用旋转涂覆工艺,采用不同的热处理工艺制备了组分为Ba/Sr=0.65/0.35的Ba0.65Sr0.35TiO3薄膜。采用XRD、SEM和阻抗分析仪分析薄膜的结晶、表面形貌和介电性能。研究了不同热处理工艺对BST薄膜晶化行为、结构和性能的影响。结果表明,最佳热分解温度和时间为400℃和30min,最佳升温速率为0.5～1℃;经650℃热处理后,BST薄膜已基本形成ABO3型钙钛矿结构,随着热处理温度的提高,薄膜的结晶程度提高,且沿(110)晶面择优取向。经750℃热处理的BST薄膜表面光滑致密无裂纹,颗粒均匀分布,晶粒发育较好,且介电性能最佳。
BST（ Ba0. 65 Sr0.35TiO3 ） thin films were prepared through different heat-treatment process by Solgel technique using barium acetates [ Ba （ CH3COOH）2 ], strontium acetates [ Sr （ CH3COOH）2 ] and titanium-tetrabutoxide[Ti（ OC4H9 ）41 as raw materials in the present work. Effects of different heattreating process on the crystal behavior, structure and properties of BST thin films were investigated in detail. The results show that the optimal prefaired temperature and time of preparing BST thin films are 400 ℃ and 30 min, and the optimal calefactive rate is 0.5 - 1 ℃/min. BST thin films has been formed ABO3 perovskite structure after annealed at 650 ℃, and the crystal degree improve with the increasing heat-treatment temperature. After annealed at 750 ℃, the surface of BST thin films are smooth, dense and crack-free, the grains are symmetrical and the dielectric properties are the best.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2008年第6期1274-1277,共4页
Bulletin of the Chinese Ceramic Society
